Properties of polysilicon films oxidized in inductively coupled plasma and its effect on thin-film transistors
- Publisher
- MRS
- Issue Date
- 1999-04-04
- Language
- English
- Citation
The 1999 MRS Spring Meeting - Symposium B 'Flat-Panel Displays and Sensors-Principles, Materials and Processes', pp.205 - 210
- ISSN
- 0272-9172
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.