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Microgyroscope with vibratory structure having a multitude of grooves Cho, Young-ho; Park, Kyu-yeon; Lee, Chong-won; Song, Ci-moo, 1998-05-19 |
Vibratory microgyroscope Cho, Young-ho; Park, Kyu-yeon; Lee, Chong-won; Song, Ci-moo, 1998-05-05 |
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