Vibratory microgyroscope

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A microgyroscope includes a substrate, a vibratory structure having two stripe portions, a plurality of connection portions, and a comb, an elastic member for elastically maintaining the vibratory structure, a driver for applying the vibratory structure, a sensor for sensing the one directional action of the vibratory structure, and a plurality of sensing electrodes for sensing displacement by Coriolis force.
Assignee
Samsung Electronics Co., Ltd.,KAIST
Country
US (United States)
Issue Date
1998-05-05
Application Date
1996-12-26
Application Number
08773990
Registration Date
1998-05-05
Registration Number
5747690
URI
http://hdl.handle.net/10203/258318
Appears in Collection
BiS-Patent(특허)ME-Patent(특허)
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