Vibratory microgyroscope
A microgyroscope includes a substrate, a vibratory structure having two stripe portions, a plurality of connection portions, and a comb, an elastic member for elastically maintaining the vibratory structure, a driver for applying the vibratory structure, a sensor for sensing the one directional action of the vibratory structure, and a plurality of sensing electrodes for sensing displacement by Coriolis force.
- Country
- US (United States)
- Issue Date
- 1998-05-05
- Application Date
- 1996-12-26
- Application Number
- 08773990
- Registration Date
- 1998-05-05
- Registration Number
- 5747690
- Appears in Collection
- BiS-Patent(특허)ME-Patent(특허)
- Files in This Item
- There are no files associated with this item.
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