Dependence of the Boron-doped Microcrystalline SiC:H Film Characteristics on Mercury Bath and Substrate Temperatures in Photo-CVD System

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Issue Date
1999-01-01
Language
ENG
Citation

International Photovoltaic Science and Eng. Conference, pp.795 - 796

URI
http://hdl.handle.net/10203/128133
Appears in Collection
EE-Conference Papers(학술회의논문)
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