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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Auto-alignment for incident angle of ellipsometer

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dc.contributor.authorPark S.ko
dc.contributor.authorJung J.ko
dc.contributor.authorSeo J.ko
dc.contributor.authorKang D.ko
dc.contributor.authorGweon, Dae-Gabko
dc.date.accessioned2013-03-16T04:47:45Z-
dc.date.available2013-03-16T04:47:45Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2001-10-29-
dc.identifier.citationOptomechatronic Systems II, pp.339 - 347-
dc.identifier.urihttp://hdl.handle.net/10203/127583-
dc.languageEnglish-
dc.publisherSPIE-
dc.titleAuto-alignment for incident angle of ellipsometer-
dc.typeConference-
dc.identifier.wosid000173561500036-
dc.identifier.scopusid2-s2.0-0035765948-
dc.type.rimsCONF-
dc.citation.beginningpage339-
dc.citation.endingpage347-
dc.citation.publicationnameOptomechatronic Systems II-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationNewton-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorPark S.-
dc.contributor.nonIdAuthorJung J.-
dc.contributor.nonIdAuthorSeo J.-
dc.contributor.nonIdAuthorKang D.-
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ME-Conference Papers(학술회의논문)
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