DC Field | Value | Language |
---|---|---|
dc.contributor.author | Gil, H.O. | - |
dc.contributor.author | Park, S.L. | - |
dc.contributor.author | Jung, J.W. | - |
dc.contributor.author | Gweon, Dae-Gab | - |
dc.date.accessioned | 2013-03-16T03:52:54Z | - |
dc.date.available | 2013-03-16T03:52:54Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2000-09 | - |
dc.identifier.citation | SPIE/ISAM, v., no., pp.92 - 101 | - |
dc.identifier.uri | http://hdl.handle.net/10203/127181 | - |
dc.language | ENG | - |
dc.title | Analysis of error and development of calibration's method to design precision rotating analyzer ellipsometer | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 92 | - |
dc.citation.endingpage | 101 | - |
dc.citation.publicationname | SPIE/ISAM | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | Gil, H.O. | - |
dc.contributor.nonIdAuthor | Park, S.L. | - |
dc.contributor.nonIdAuthor | Jung, J.W. | - |
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