Self-balanced high-resolution capacitive microaccelerometers using branched finger electrodes with high-amplitude sense voltage
- Issue Date
- 2002-01-20
- Language
- ENG
- Citation
15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, pp.714 - 717
- Appears in Collection
- BiS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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