Self-balanced high-resolution capacitive microaccelerometers using branched finger electrodes with high-amplitude sense voltage
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Han, KH | - |
| dc.contributor.author | Cho, Young-Ho | - |
| dc.date.accessioned | 2013-03-16T02:16:21Z | - |
| dc.date.available | 2013-03-16T02:16:21Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002-01-20 | - |
| dc.identifier.citation | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, v., no., pp.714 - 717 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/126381 | - |
| dc.language | ENG | - |
| dc.title | Self-balanced high-resolution capacitive microaccelerometers using branched finger electrodes with high-amplitude sense voltage | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-0036122191 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 714 | - |
| dc.citation.endingpage | 717 | - |
| dc.citation.publicationname | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Cho, Young-Ho | - |
| dc.contributor.nonIdAuthor | Han, KH | - |
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