Experimental investigation of the 3-axis nanoslider in the inertial sliding mode and stick mode positioning

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Issue Date
2002-10-15
Language
KOR
Citation

The 1st Korea-japan conference on positioning technology, CPT 2002, pp.137 - 140

URI
http://hdl.handle.net/10203/126300
Appears in Collection
ME-Conference Papers(학술회의논문)
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