Efficient real-time scheduling of integrated equipment in semiconductor fabrication
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yoon, H.J. | ko |
| dc.contributor.author | Lee, Doo Yong | ko |
| dc.date.accessioned | 2013-03-16T00:44:35Z | - |
| dc.date.available | 2013-03-16T00:44:35Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002-05-11 | - |
| dc.identifier.citation | IEEE International Conference on Robotics and Automation, 2002, pp.3624 - 3629 | - |
| dc.identifier.issn | 1050-4729 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/125681 | - |
| dc.language | English | - |
| dc.publisher | IEEE | - |
| dc.title | Efficient real-time scheduling of integrated equipment in semiconductor fabrication | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000178573200573 | - |
| dc.identifier.scopusid | 2-s2.0-0036061190 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 3624 | - |
| dc.citation.endingpage | 3629 | - |
| dc.citation.publicationname | IEEE International Conference on Robotics and Automation, 2002 | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Washington, DC | - |
| dc.contributor.localauthor | Lee, Doo Yong | - |
| dc.contributor.nonIdAuthor | Yoon, H.J. | - |
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