Properties of Phosphorus-Doped Microcrystalline Si Thin Films by PECVD
- Issue Date
- 1995
- Language
- ENG
- Citation
Fabrication and Characterization of Advanced Matrials, Proc. of 3rd IUMRS International Conference in Asia, pp.1131 - 1136
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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