A low-voltage actuated micromachined microwave switch using torsion springs and leverage

Abstract

In this paper, a push-pull type microwave switch is proposed, which utilizes torsion springs and leverage for low-voltage operation. The switching operation up to 4 GHz is demonstrated. The actuation voltage is similar to5 V. The insertion loss of similar to1 dB and the isolation as high as similar to 40 dB at 1 GHz are achieved by the push-pull operation.