DSpace at KOASAS: MeV-(P+, B+, Si+) Ion-Induced-Damages and Secondary Defect Formations by Thermal Annealing in Silicon

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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

MeV-(P+, B+, Si+) Ion-Induced-Damages and Secondary Defect Formations by Thermal Annealing in Silicon

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Lee, Jeong Yong researcher

Publisher: Advanced Materials and Processing

Issue Date: 1995-06

Language: English

Citation: Second Pacific Rim International Conference on Advanced Materials and Processing, pp.1297 - 1302

URI: http://hdl.handle.net/10203/119993

Appears in Collection: MS-Conference Papers(학술회의논문)

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