MeV-(P+, B+, Si+) Ion-Induced-Damages and Secondary Defect Formations by Thermal Annealing in Silicon
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Jeong Yong | ko |
| dc.date.accessioned | 2013-03-15T13:52:38Z | - |
| dc.date.available | 2013-03-15T13:52:38Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995-06 | - |
| dc.identifier.citation | Second Pacific Rim International Conference on Advanced Materials and Processing, pp.1297 - 1302 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119993 | - |
| dc.language | English | - |
| dc.publisher | Advanced Materials and Processing | - |
| dc.title | MeV-(P+, B+, Si+) Ion-Induced-Damages and Secondary Defect Formations by Thermal Annealing in Silicon | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 1297 | - |
| dc.citation.endingpage | 1302 | - |
| dc.citation.publicationname | Second Pacific Rim International Conference on Advanced Materials and Processing | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | Kyongju, Korea | - |
| dc.contributor.localauthor | Lee, Jeong Yong | - |
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