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College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Conference Papers(학술회의논문)

RTP 시스템내의 웨이퍼 온도 균일도를 위한 모델링 및 모사

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박형진 / 이정석 / 박선원researcher
Publisher
KIChE
Issue Date
1998-01-01
Language
KOR
Citation

KIChE Meeting

URI
http://hdl.handle.net/10203/119254
Appears in Collection
CBE-Conference Papers(학술회의논문)
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