RTP 시스템내의 웨이퍼 온도 균일도를 위한 모델링 및 모사
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박형진 | - |
| dc.contributor.author | 이정석 | - |
| dc.contributor.author | 박선원 | - |
| dc.date.accessioned | 2013-03-15T11:55:58Z | - |
| dc.date.available | 2013-03-15T11:55:58Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-01-01 | - |
| dc.identifier.citation | KIChE Meeting, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119254 | - |
| dc.language | KOR | - |
| dc.publisher | KIChE | - |
| dc.title | RTP 시스템내의 웨이퍼 온도 균일도를 위한 모델링 및 모사 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | KIChE Meeting | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 박선원 | - |
| dc.contributor.nonIdAuthor | 박형진 | - |
| dc.contributor.nonIdAuthor | 이정석 | - |
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- CBE-Conference Papers(학술회의논문)
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