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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Stability of CrFx films for phase-shifting mask

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Kim, Eun Ah / Hong, Seung Bum / Jiang, Zhong-Tao / Lim, Sung C / Woo, Sang-Gyun / Koh, Young-Bum / No, Kwangsooresearcher
Issue Date
1997-04-17
Language
ENG
Citation

Photomask and X-Ray Mask Technology IV, v.3096, pp.294 - 297

URI
http://hdl.handle.net/10203/118109
Appears in Collection
MS-Conference Papers(학술회의논문)
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