DSpace at KOASAS
College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Stability of CrFx films for phase-shifting mask

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 335
  • Download : 0
Export
DC FieldValueLanguage
dc.contributor.authorKim, Eun Ah-
dc.contributor.authorHong, Seung Bum-
dc.contributor.authorJiang, Zhong-Tao-
dc.contributor.authorLim, Sung C-
dc.contributor.authorWoo, Sang-Gyun-
dc.contributor.authorKoh, Young-Bum-
dc.contributor.authorNo, Kwangsoo-
dc.date.accessioned2013-03-15T09:05:33Z-
dc.date.available2013-03-15T09:05:33Z-
dc.date.created2012-02-06-
dc.date.issued1997-04-17-
dc.identifier.citationPhotomask and X-Ray Mask Technology IV, v.3096, no., pp.294 - 297-
dc.identifier.urihttp://hdl.handle.net/10203/118109-
dc.languageENG-
dc.titleStability of CrFx films for phase-shifting mask-
dc.typeConference-
dc.identifier.scopusid2-s2.0-0031356950-
dc.type.rimsCONF-
dc.citation.volume3096-
dc.citation.beginningpage294-
dc.citation.endingpage297-
dc.citation.publicationnamePhotomask and X-Ray Mask Technology IV-
dc.identifier.conferencecountryJapan-
dc.identifier.conferencecountryJapan-
dc.contributor.localauthorNo, Kwangsoo-
dc.contributor.nonIdAuthorKim, Eun Ah-
dc.contributor.nonIdAuthorHong, Seung Bum-
dc.contributor.nonIdAuthorJiang, Zhong-Tao-
dc.contributor.nonIdAuthorLim, Sung C-
dc.contributor.nonIdAuthorWoo, Sang-Gyun-
dc.contributor.nonIdAuthorKoh, Young-Bum-
Appears in Collection
MS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

Display Simple Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0