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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Novel monolithic and multilevel integration of high-precision 3-D microfluidic components

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Yoon, Jun-Boresearcher / Han, Chul-Hiresearcher / Yoon, Euisikresearcher / Kim, Choong Ki
Publisher
SPIE
Issue Date
1998-09-21
Language
English
Citation

Proceedings of the SPIE symposium on Micromachining and Microfabrication: Materials and Device Characterization in micromachining, pp.183 - 191

URI
http://hdl.handle.net/10203/117342
Appears in Collection
EE-Conference Papers(학술회의논문)RIMS Conference Papers
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