DSpace at KOASAS: Novel Fabrication of Electroplated 3D Micro-Coils Using 3D Photolithography of Thick Photoresist

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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Novel Fabrication of Electroplated 3D Micro-Coils Using 3D Photolithography of Thick Photoresist

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Yoon, Jun-Bo researcher / Han, Chul-Hi researcher / Yoon, Euisik researcher / Kim, Choong Ki

Publisher: The Korean Institute of Telematics and Electronics

Issue Date: 1998-07

Language: English

Citation: International Microprocesses and Nanotechnology Conference, pp.85 - 86

URI: http://hdl.handle.net/10203/117136

Appears in Collection: EE-Conference Papers(학술회의논문)RIMS Conference Papers

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