Control Strategy of Fine Manipulator with Compliance For Wafer Probing System Based on Magnetic Levitation
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Choi, K.B. | ko |
| dc.contributor.author | Kim, Soohyun | ko |
| dc.contributor.author | Kwak,Y. K. | ko |
| dc.date.accessioned | 2013-03-15T05:31:25Z | - |
| dc.date.available | 2013-03-15T05:31:25Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997-05 | - |
| dc.identifier.citation | 2nd Int. Conf. MV2 on Active Cont. in Mechanical Eng | - |
| dc.identifier.uri | http://hdl.handle.net/10203/116700 | - |
| dc.language | English | - |
| dc.publisher | MV2 | - |
| dc.title | Control Strategy of Fine Manipulator with Compliance For Wafer Probing System Based on Magnetic Levitation | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000087208800010 | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2nd Int. Conf. MV2 on Active Cont. in Mechanical Eng | - |
| dc.identifier.conferencecountry | FR | - |
| dc.identifier.conferencelocation | Lyon | - |
| dc.contributor.localauthor | Kim, Soohyun | - |
| dc.contributor.nonIdAuthor | Choi, K.B. | - |
| dc.contributor.nonIdAuthor | Kwak,Y. K. | - |
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