미세패턴 측정을 위한 주사터널링현미경 원리의 응용An Application of Scanning Tunneling Microscopy for Measurement of Micro-Patterns
- Publisher
- 대한기계학회
- Issue Date
- 1993
- Language
- KOR
- Citation
대한기계학회 1993년 춘추학술대회, v.1, no.1, pp.771 - 774
- Appears in Collection
- ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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