An Investigation on the Resistivity Abnormaly Phenomenon in highly Boron-doped Cz Silicon Substrate during NMOS Simulation and High Temperature Annealing
- Publisher
- Electrochemical Society
- Issue Date
- 1994-05
- Language
- English
- Citation
San Francisco Meeting of the Electrochemical Society, pp.22 - 27
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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