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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

TEM Studies of Plasma Deposited Tungsten and Tungsten Nitride Barriers from Thermally Stable Metallization

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Lee, Jeong Yongresearcher / Lee, Choochon / Lee, CW / Kim, YT / Min, SK / Lee, JY / Park, YW
Issue Date
1994-12-01
Language
ENG
Citation

MRS Symposium Proc., pp.335 - 340

URI
http://hdl.handle.net/10203/106692
Appears in Collection
MS-Conference Papers(학술회의논문)
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