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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

TEM Studies of Plasma Deposited Tungsten and Tungsten Nitride Barriers from Thermally Stable Metallization

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dc.contributor.authorLee, Jeong Yong-
dc.contributor.authorLee, Choochon-
dc.contributor.authorLee, CW-
dc.contributor.authorKim, YT-
dc.contributor.authorMin, SK-
dc.contributor.authorLee, JY-
dc.contributor.authorPark, YW-
dc.date.accessioned2013-03-14T07:48:38Z-
dc.date.available2013-03-14T07:48:38Z-
dc.date.created2012-02-06-
dc.date.issued1994-12-01-
dc.identifier.citationMRS Symposium Proc., v., no., pp.335 - 340-
dc.identifier.urihttp://hdl.handle.net/10203/106692-
dc.languageENG-
dc.titleTEM Studies of Plasma Deposited Tungsten and Tungsten Nitride Barriers from Thermally Stable Metallization-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage335-
dc.citation.endingpage340-
dc.citation.publicationnameMRS Symposium Proc.-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorLee, Jeong Yong-
dc.contributor.localauthorLee, Choochon-
dc.contributor.nonIdAuthorLee, CW-
dc.contributor.nonIdAuthorKim, YT-
dc.contributor.nonIdAuthorMin, SK-
dc.contributor.nonIdAuthorLee, JY-
dc.contributor.nonIdAuthorPark, YW-
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MS-Conference Papers(학술회의논문)
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