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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Journal Papers(저널논문)

Simulation to Compensate Ripple of Air Bearing Stage with Flexure Hinge Mechanisms

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Ahn, Dahoon / Gweon, Dae-Gabresearcher / Hong, Dongpyo
Publisher
material science and engineering
Issue Date
2011-07
Language
English
Citation

ADVANCED MATERIALS RESEARCH, v.301-303, pp.1795 - 1799

ISSN
1662-8985
URI
http://hdl.handle.net/10203/103562
Appears in Collection
ME-Journal Papers(저널논문)
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