Simulation to Compensate Ripple of Air Bearing Stage with Flexure Hinge Mechanisms
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ahn, Dahoon | ko |
| dc.contributor.author | Gweon, Dae-Gab | ko |
| dc.contributor.author | Hong, Dongpyo | ko |
| dc.date.accessioned | 2013-03-12T21:24:49Z | - |
| dc.date.available | 2013-03-12T21:24:49Z | - |
| dc.date.created | 2012-07-07 | - |
| dc.date.created | 2012-07-07 | - |
| dc.date.issued | 2011-07 | - |
| dc.identifier.citation | ADVANCED MATERIALS RESEARCH, v.301-303, pp.1795 - 1799 | - |
| dc.identifier.issn | 1662-8985 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/103562 | - |
| dc.language | English | - |
| dc.publisher | material science and engineering | - |
| dc.title | Simulation to Compensate Ripple of Air Bearing Stage with Flexure Hinge Mechanisms | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 301-303 | - |
| dc.citation.beginningpage | 1795 | - |
| dc.citation.endingpage | 1799 | - |
| dc.citation.publicationname | ADVANCED MATERIALS RESEARCH | - |
| dc.contributor.localauthor | Gweon, Dae-Gab | - |
| dc.contributor.nonIdAuthor | Ahn, Dahoon | - |
| dc.contributor.nonIdAuthor | Hong, Dongpyo | - |
- Appears in Collection
- ME-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.