Solvent-Assisted Decal Transfer Lithography by Oxygen-Plasma Bonding and Anisotropic Swelling
Solvent-assisted decal transfer lithography (DTL) enables the formation of well-defined micro-/nanostructures over a large area (similar to 4 in. wafer) by combining irreversible oxygen bonding and anisotropic swelling of poly(dimethoxylsiloxane) (PDMS). Such swelling-induced stress gradient allows for cohesion failure of the skin layer upon removal of the stamp, leaving behind a highly uniform layer (similar to 100 nm).
- Publisher
- WILEY-V C H VERLAG GMBH
- Issue Date
- 2010-06
- Language
- English
- Article Type
- Article
- Keywords
STAMP DEFORMATION; SCALE; SUBSTRATE; SURFACES; ADHESION
- Citation
ADVANCED MATERIALS, v.22, no.22, pp.2426 - 2426
- ISSN
- 0935-9648
- Appears in Collection
- BiS-Journal Papers(저널논문)
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