Quantitative studies of long-term stable, top-down fabricated silicon nanowire pH sensors

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We report a simple and effective method to develop long-term stable, top-down fabricated silicon nanowire (SiNW) pH sensors along with systematic studies on the performance of the sensors. In this work, we fabricated the SiNW pH sensors based on top-down fabrication processes. In order to improve the stability of the sensor performance, the sensors were coated with a passivation layer (PECVD-based silicon nitride) for effective electrical insulation and ion-blocking. The stability, pH sensitivity, and repeatability of the sensor response are critically analyzed with regard to the physics of sensing interface between sample liquid and the sensor surface. Also, trade-off between the stability and pH sensitivity of the sensor response is discussed.
Publisher
SPRINGER
Issue Date
2012-05
Language
English
Article Type
Article
Citation

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, v.107, no.2, pp.421 - 428

ISSN
0947-8396
DOI
10.1007/s00339-011-6754-9
URI
http://hdl.handle.net/10203/101744
Appears in Collection
ME-Journal Papers(저널논문)
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