DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, Sun | ko |
dc.contributor.author | Park, Inkyu | ko |
dc.contributor.author | Hao, Zhao | ko |
dc.contributor.author | Holman, Hoi-Ying N. | ko |
dc.contributor.author | Pisano, Albert P. | ko |
dc.date.accessioned | 2013-03-12T08:13:09Z | - |
dc.date.available | 2013-03-12T08:13:09Z | - |
dc.date.created | 2012-06-11 | - |
dc.date.created | 2012-06-11 | - |
dc.date.created | 2012-06-11 | - |
dc.date.issued | 2012-05 | - |
dc.identifier.citation | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, v.107, no.2, pp.421 - 428 | - |
dc.identifier.issn | 0947-8396 | - |
dc.identifier.uri | http://hdl.handle.net/10203/101744 | - |
dc.description.abstract | We report a simple and effective method to develop long-term stable, top-down fabricated silicon nanowire (SiNW) pH sensors along with systematic studies on the performance of the sensors. In this work, we fabricated the SiNW pH sensors based on top-down fabrication processes. In order to improve the stability of the sensor performance, the sensors were coated with a passivation layer (PECVD-based silicon nitride) for effective electrical insulation and ion-blocking. The stability, pH sensitivity, and repeatability of the sensor response are critically analyzed with regard to the physics of sensing interface between sample liquid and the sensor surface. Also, trade-off between the stability and pH sensitivity of the sensor response is discussed. | - |
dc.language | English | - |
dc.publisher | SPRINGER | - |
dc.title | Quantitative studies of long-term stable, top-down fabricated silicon nanowire pH sensors | - |
dc.type | Article | - |
dc.identifier.wosid | 000302643200023 | - |
dc.identifier.scopusid | 2-s2.0-84861571718 | - |
dc.type.rims | ART | - |
dc.citation.volume | 107 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 421 | - |
dc.citation.endingpage | 428 | - |
dc.citation.publicationname | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | - |
dc.identifier.doi | 10.1007/s00339-011-6754-9 | - |
dc.contributor.localauthor | Park, Inkyu | - |
dc.contributor.nonIdAuthor | Choi, Sun | - |
dc.contributor.nonIdAuthor | Hao, Zhao | - |
dc.contributor.nonIdAuthor | Holman, Hoi-Ying N. | - |
dc.contributor.nonIdAuthor | Pisano, Albert P. | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | DIFFUSION-COEFFICIENT | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | HYSTERESIS | - |
dc.subject.keywordPlus | TRANSISTORS | - |
dc.subject.keywordPlus | ISFETS | - |
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