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Synthesis and lithographic characterization of poly(N-p-(tert-butoxycarvbonyloxy)phenyl dimethacrylamide) = 폴리(N-파라-(터셔리-부톡시카르보닐옥시)페닐 디메타크릴아미드)의 합성 과및 리소그라피 특성link

Kwon, Kyong-Il; 권경일; et al, 한국과학기술원, 1997

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