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A high fill-factor infrared bolometer using micromachined multilevel electrothermal structures Lee, HK; Yoon, Jun-Bo; Yoon, E; Ju, SB; Yong, YJ; Lee, W; Kim, SG, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.46, no.7, pp.1489 - 1491, 1999-07 |
Optical characterization of high speed scanning micromirrors with vertical combdrives Wada, H; Lee, D; Yu, Kyoungsik; Krishnamoorthy, U; Solgaard, O, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.41, no.10B, pp.1169 - 1171, 2002-10 |
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