Optical characterization of high speed scanning micromirrors with vertical combdrives

Abstract

We measured the resonant frequency and optical scan angle of 200 mum by 200mum scanning micromirrors actuated by vertical combdrives. The prototype devices were fabricated by our 3-level micro-electro-mechanical-systems (MEMS) process, which is based on two bond-and-etch fabrication steps. The optical scan angle of the device with the highest spring constant vas 1.4 degrees at its 43.34 kHz resonance frequency when actuated by a voltage of 78 VAC.