Browse by Subject Electron-beam-induced crystallization▼aion-beam-induced amorphization▼aPlasma▼a3D monolithic integration▼aion implantation▼ain-situ TEM▼alow thermal budget
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| Atomic rearrangement of amorphous silicon by Sub-1 keV electron irradiation in plasma = 플라즈마 내 1 keV 미만의 전자 조사에 의한 비정질 실리콘의 원자 재결합link Kim, Da-Jin; Choi, Yang-Kyu; et al, 한국과학기술원, 2020 |
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