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Low-Temperature Deuterium Annealing to Improve Performance and Reliability in a MOSFET Yu, Ji-Man; Wang, Dong-Hyun; Ku, Ja-Yun; Han, Joon-Kyu; Jung, Dae-Han; Park, Jun-Young; Choi, Yang-Kyu, SOLID-STATE ELECTRONICS, v.197, 2022-11 |
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