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Wafer-Scale CMOS-Compatible Electro-Thermally Actuated Nanomechanical Non-Volatile Switch with Out-of-Plane Electrode Configuration Lee, Yong-Bok; Choi, Pan-Hyu; Kang, Min-Ho; Kim Su-Hyun; Lee, Seung-Jun; KIm, Tae-Soo; Lee, So-Young; et al, Advanced Electron Materials, 2024-04 |
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