Browse by Subject timed event graph

Showing results 3 to 5 of 5

3
Feedback control of cluster tools with time constraints = 시간 제약을 가지는 클러스터 장비의 피드백 제어link

Kim, Chulhan; 김철한; et al, 한국과학기술원, 2015

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K-Cyclic Schedules and the Worst-Case Wafer Delay in a Dual-Armed Cluster Tool

Roh, Dong-Hyun; Lee, Tae-Gyung; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.32, no.2, pp.236 - 249, 2019-05

5
Token Delays and Generalized Workload Balancing for Timed Event Graphs with Application to Cluster Tool

Lee, Tae-Eog; Lee, Hwan-Yong; Sreenivas, Ramavarapu S., Proceeding of the 2006 IEEE Cinference on Automation Science and Engineering, pp.93-99, 2006

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