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Calibration method for rotating-analyser-type spectral imaging ellipsometers Chegal, W; Cho, YJ; Oh, SB; Cho, HM; Lee, YW; Kim, Soohyun, MEASUREMENT SCIENCE & TECHNOLOGY, v.16, pp.716 - 722, 2005-03 |
Fast thickness profile measurement using a peak detection method based on an acousto-optic tunable filter Kim, D; Kim, S; Kong, Hong-Jin; Lee, Y; Kwak, YK, MEASUREMENT SCIENCE TECHNOLOGY, v.13, no.7, pp.1 - 5, 2002-07 |
다파장 간섭계를 이용한 위상 물체의 2차원 굴절률 분포와 두께 측정을 위한 분리 알고리즘 = Separation algorithm for 2D refractive index distribution and thickness profile of phase object using multi-wavelength interferometrylink 이광천; Lee, Kwang-Chun; et al, 한국과학기술원, 2009 |
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