Fast thickness profile measurement using a peak detection method based on an acousto-optic tunable filter

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In this communication, we describe a fast thickness profile measurement method for a transparent film, thinner than the white-light coherence length of 3-4 mum that is deposited on pattern structures. A visible acousto-optic tunable filter is employed for real-time wavelength scanning and the three-dimensional volumetric thin-film thickness profile information is obtained using a simple peak detection method in the spectral domain. The key idea is to divide the measurement into two states using a beam blocking mechanism to separately obtain the two unknowns of thickness and surface profile. Such separate measurements are required to compensate for the phase change effect caused by the multi-reflected beams from the thin film. The final thin-film surface profile information is measured by obtaining the number of peaks and phase deviations from the two separately scanned spectral intensity values.
Publisher
IOP PUBLISHING LTD
Issue Date
2002-07
Language
English
Article Type
Article
Keywords

WHITE-LIGHT

Citation

MEASUREMENT SCIENCE TECHNOLOGY, v.13, no.7, pp.1 - 5

ISSN
0957-0233
URI
http://hdl.handle.net/10203/2640
Appears in Collection
PH-Journal Papers(저널논문)
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