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Formation of ReSi1.75 thin films on si substrates by using Ta getter Dow, Hwan-Soo; Oh, Min-Wook; Song, Seong-Hun; Kim, Min-Chul; Wee, Dang-Moon, JOURNAL OF THE KOREAN INSTITUTE OF METALS AND MATERIALS, v.45, no.6, pp.383 - 388, 2007-06 |
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