DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kang, JH | ko |
dc.contributor.author | Um, Eu-Jin | ko |
dc.contributor.author | Park, Je-Kyun | ko |
dc.date.accessioned | 2013-03-11T18:08:31Z | - |
dc.date.available | 2013-03-11T18:08:31Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2009-04 | - |
dc.identifier.citation | JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.19, no.4, pp.045027 | - |
dc.identifier.issn | 0960-1317 | - |
dc.identifier.uri | http://hdl.handle.net/10203/99837 | - |
dc.description.abstract | We report a simple method for the fabrication of a poly(dimethylsiloxane) (PDMS) membrane with through-holes by blowing a residual prepolymer away from a photoresist (PR)-patterned Si wafer. The fabrication method for the perforated polymer membrane is crucial to achieve both complicated three-dimensional microfluidic devices and polymer sieve sheets. This method has several advantages over the previous methods in that we can repeatedly make the well-defined holes on the PDMS membranes even if the excess prepolymer remains on the PR mold after spincoating at a relatively low rpm. In addition, the desired pattern can be selectively perforated from the whole wafer even if the mold is fabricated by single-step lithography. | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.subject | CELLS | - |
dc.subject | PROTEINS | - |
dc.subject | CULTURE | - |
dc.subject | SYSTEMS | - |
dc.title | Fabrication of a poly(dimethylsiloxane) membrane with well-defined through-holes for three-dimensional microfluidic networks | - |
dc.type | Article | - |
dc.identifier.wosid | 000264575800027 | - |
dc.identifier.scopusid | 2-s2.0-67849083164 | - |
dc.type.rims | ART | - |
dc.citation.volume | 19 | - |
dc.citation.issue | 4 | - |
dc.citation.beginningpage | 045027 | - |
dc.citation.publicationname | JOURNAL OF MICROMECHANICS AND MICROENGINEERING | - |
dc.identifier.doi | 10.1088/0960-1317/19/4/045027 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Park, Je-Kyun | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | CELLS | - |
dc.subject.keywordPlus | PROTEINS | - |
dc.subject.keywordPlus | CULTURE | - |
dc.subject.keywordPlus | SYSTEMS | - |
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