DC Field | Value | Language |
---|---|---|
dc.contributor.author | Mocek, T. | ko |
dc.contributor.author | Jakubczak, K. | ko |
dc.contributor.author | Kozlova, M. | ko |
dc.contributor.author | Polan, J. | ko |
dc.contributor.author | Homer, P. | ko |
dc.contributor.author | Hrebicek, J. | ko |
dc.contributor.author | Sawicka, M. | ko |
dc.contributor.author | Kim, I-Jong | ko |
dc.contributor.author | Park, S. B. | ko |
dc.contributor.author | KIm, Chul-Min | ko |
dc.contributor.author | Lee, Gae-Hwang | ko |
dc.contributor.author | Kim, Tae-Keun | ko |
dc.contributor.author | Nam, Chang-Hee | ko |
dc.contributor.author | Chalupsky, J. | ko |
dc.contributor.author | Hajkova, V. | ko |
dc.contributor.author | Juha, L. | ko |
dc.contributor.author | Sobota, J. | ko |
dc.contributor.author | Fort, T. | ko |
dc.contributor.author | Rus, B. | ko |
dc.date.accessioned | 2013-03-11T17:55:53Z | - |
dc.date.available | 2013-03-11T17:55:53Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2010 | - |
dc.identifier.citation | RADIATION EFFECTS AND DEFECTS IN SOLIDS, v.165, no.6-10, pp.551 - 558 | - |
dc.identifier.issn | 1042-0150 | - |
dc.identifier.uri | http://hdl.handle.net/10203/99798 | - |
dc.description.abstract | We report on a single-shot micropatterning of an organic polymer achieved by ablation with demagnifying projection using a plasma-based extreme ultraviolet (XUV) laser at 21nm. A nickel mesh with a period of 100 m was 10xdemagnified and imprinted on poly(methyl methacrylate) (PMMA) via direct ablation. This first demonstration of single-shot projection, single-step lithography illustrates the great potential of XUV lasers for the direct patterning of materials with a resolution scalable down to the submicrometer domain. In the second part, we present a novel experimental method for improving the efficiency of surface processing of various solids achieved by simultaneous action of XUV, obtained from high-order harmonic generation, and near-infrared (NIR)-VIS laser pulses. The NIR-VIS pulse interacts with free charge carriers produced by the energetic XUV photons, so that its absorption dramatically increases. Laser-induced periodic surface structures were effectively produced using this technique. | - |
dc.language | English | - |
dc.publisher | TAYLOR FRANCIS LTD | - |
dc.subject | X-RAY LASER | - |
dc.subject | POLYMERS | - |
dc.title | Ablative microstructuring with plasma-based XUV lasers and efficient processing of materials by dual action of XUV/NIR-VIS ultrashort pulses | - |
dc.type | Article | - |
dc.identifier.wosid | 000281854500021 | - |
dc.identifier.scopusid | 2-s2.0-77957007725 | - |
dc.type.rims | ART | - |
dc.citation.volume | 165 | - |
dc.citation.issue | 6-10 | - |
dc.citation.beginningpage | 551 | - |
dc.citation.endingpage | 558 | - |
dc.citation.publicationname | RADIATION EFFECTS AND DEFECTS IN SOLIDS | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Nam, Chang-Hee | - |
dc.contributor.nonIdAuthor | Mocek, T. | - |
dc.contributor.nonIdAuthor | Jakubczak, K. | - |
dc.contributor.nonIdAuthor | Kozlova, M. | - |
dc.contributor.nonIdAuthor | Polan, J. | - |
dc.contributor.nonIdAuthor | Homer, P. | - |
dc.contributor.nonIdAuthor | Hrebicek, J. | - |
dc.contributor.nonIdAuthor | Sawicka, M. | - |
dc.contributor.nonIdAuthor | Chalupsky, J. | - |
dc.contributor.nonIdAuthor | Hajkova, V. | - |
dc.contributor.nonIdAuthor | Juha, L. | - |
dc.contributor.nonIdAuthor | Sobota, J. | - |
dc.contributor.nonIdAuthor | Fort, T. | - |
dc.contributor.nonIdAuthor | Rus, B. | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | XUV lasers | - |
dc.subject.keywordAuthor | ablation | - |
dc.subject.keywordAuthor | microstructuring | - |
dc.subject.keywordAuthor | laser-induced periodic surface structures | - |
dc.subject.keywordPlus | X-RAY LASER | - |
dc.subject.keywordPlus | POLYMERS | - |
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