Browse "EEW-Journal Papers(저널논문)" by Author Im, K
Showing results 1 to 3 of 3
| Characteristics of solid-phase diffused ultra-shallow junction using phosphorus doped silicon oxide films for fabrication of sub-100 nm SOI MOSFET Cho, WJ; Im, K; Yang, JH; Oh, Jihun; Lee, S, JOURNAL OF MATERIALS SCIENCE, v.39, no.5, pp.1819 - 1821, 2004-03 |
| Fabrication and process simulation of SOI MOSFETs with a 30-nm gate length Cho, WJ; Yang, JH; Im, K; Oh, Jihun; Lee, S; Parr, K, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.43, no.5, pp.892 - 897, 2003-11 |
| Ultra shallow and abrupt n(+)-p junction formations on silicon-on-insulator by solid phase diffusion of arsenic from spin-on-dopant for sub 50 nm Si metal-oxide-semiconductor devices Oh, Jihun; Im, K; Ahn, CG; Yang, JH; Cho, WJ; Lee, S; Park, K, MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, v.110, no.2, pp.185 - 189, 2004-07 |
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Open Access
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