DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Su-Min | ko |
dc.contributor.author | Ku, Se-Jin | ko |
dc.contributor.author | Kim, Jin-Baek | ko |
dc.date.accessioned | 2013-03-11T06:07:32Z | - |
dc.date.available | 2013-03-11T06:07:32Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2010-06 | - |
dc.identifier.citation | NANOTECHNOLOGY, v.21, no.23 | - |
dc.identifier.issn | 0957-4484 | - |
dc.identifier.uri | http://hdl.handle.net/10203/98467 | - |
dc.description.abstract | Silicon oxide nanodot arrays were fabricated using functionalized block copolymer templates and selective silylation. A polystyrene-b-poly(acrylic acid/acrylic anhydride) (PS-b-PAA/AN) thin film containing spherical nanodomains was used as a template to build nanoscopic silica structures. A PS-b-PAA/AN thin film was prepared by acid-catalyzed thermal deprotection of polystyrene-b-poly(tert-butyl acrylate) on an SU-8 resist film containing a photoacid generator. This resulting film has excellent solvent and thermal resistance due to crosslinked anhydride linkages in carboxyl-functionalized PAA/AN block domains. Silicon was introduced by spin-spraying of hexamethyldisilazane (HMDS) over the entire surface of a self-assembled PS-b-PAA/AN thin film. HMDS was selectively reacted with carboxylic acid groups in spherical domains of a PAA/AN block. SiO2 nanodot arrays were generated by oxygen reactive ion etching. | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.subject | THIN-FILMS | - |
dc.subject | SILICON-OXIDE | - |
dc.subject | NANOSTRUCTURES | - |
dc.subject | LITHOGRAPHY | - |
dc.subject | SCAFFOLDS | - |
dc.title | SiO(2) nanodot arrays using functionalized block copolymer templates and selective silylation | - |
dc.type | Article | - |
dc.identifier.wosid | 000277746900013 | - |
dc.type.rims | ART | - |
dc.citation.volume | 21 | - |
dc.citation.issue | 23 | - |
dc.citation.publicationname | NANOTECHNOLOGY | - |
dc.identifier.doi | 10.1088/0957-4484/21/23/235302 | - |
dc.contributor.localauthor | Kim, Jin-Baek | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | SILICON-OXIDE | - |
dc.subject.keywordPlus | NANOSTRUCTURES | - |
dc.subject.keywordPlus | LITHOGRAPHY | - |
dc.subject.keywordPlus | SCAFFOLDS | - |
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