DC Field | Value | Language |
---|---|---|
dc.contributor.author | 손용 | ko |
dc.contributor.author | 임태우 | ko |
dc.contributor.author | 하철우 | ko |
dc.contributor.author | 양동열 | ko |
dc.contributor.author | 정병제 | ko |
dc.contributor.author | 공홍진 | ko |
dc.date.accessioned | 2013-03-09T19:02:35Z | - |
dc.date.available | 2013-03-09T19:02:35Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2010-10 | - |
dc.identifier.citation | 한국정밀공학회지, v.27, no.10, pp.93 - 99 | - |
dc.identifier.issn | 1225-9071 | - |
dc.identifier.uri | http://hdl.handle.net/10203/97220 | - |
dc.description.abstract | A nano-stereolithography is the direct patterning process with a nanoscale resolution using twophoton absorption induced by a femtosecond laser. However, in the majority of the works, the fabrication of 3D microstructures have been done only onto transparent glass due to the use of an oil immersion objective lens for achieving a high resolution. In this work, the coaxial illumination and the auto-focusing system are proposed for the direct patterning of nano-precision patterns on an opaque substrate such as a silicon wafer and a metal substrate. Through this work, 3D polymer structures and metallic patterns are fabricated on a silicon wafer using the developed process. | - |
dc.language | Korean | - |
dc.publisher | 한국정밀공학회 | - |
dc.title | 나노 스테레오리소그래피 공정을 이용한 불투명 기판에서의 3차원 마이크로 형상 제작 방법에 관한 연구 | - |
dc.title.alternative | Direct Patterning of 3D Microstructures on an Opaque Substrate Using Nano- Stereolithography | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 27 | - |
dc.citation.issue | 10 | - |
dc.citation.beginningpage | 93 | - |
dc.citation.endingpage | 99 | - |
dc.citation.publicationname | 한국정밀공학회지 | - |
dc.identifier.kciid | ART001480646 | - |
dc.contributor.localauthor | 양동열 | - |
dc.contributor.nonIdAuthor | 손용 | - |
dc.contributor.nonIdAuthor | 임태우 | - |
dc.contributor.nonIdAuthor | 하철우 | - |
dc.contributor.nonIdAuthor | 정병제 | - |
dc.contributor.nonIdAuthor | 공홍진 | - |
dc.subject.keywordAuthor | Nano-Stereolithography (나노 스테레오리소그래피) | - |
dc.subject.keywordAuthor | Two-photon Absorption (이광자 흡수현상) | - |
dc.subject.keywordAuthor | Femtosecond Laser (펨토초 레이저) | - |
dc.subject.keywordAuthor | Opaque Substrate (불투명 기판) | - |
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