나노 스테레오리소그래피 공정을 이용한 불투명 기판에서의 3차원 마이크로 형상 제작 방법에 관한 연구Direct Patterning of 3D Microstructures on an Opaque Substrate Using Nano- Stereolithography

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dc.contributor.author손용ko
dc.contributor.author임태우ko
dc.contributor.author하철우ko
dc.contributor.author양동열ko
dc.contributor.author정병제ko
dc.contributor.author공홍진ko
dc.date.accessioned2013-03-09T19:02:35Z-
dc.date.available2013-03-09T19:02:35Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2010-10-
dc.identifier.citation한국정밀공학회지, v.27, no.10, pp.93 - 99-
dc.identifier.issn1225-9071-
dc.identifier.urihttp://hdl.handle.net/10203/97220-
dc.description.abstractA nano-stereolithography is the direct patterning process with a nanoscale resolution using twophoton absorption induced by a femtosecond laser. However, in the majority of the works, the fabrication of 3D microstructures have been done only onto transparent glass due to the use of an oil immersion objective lens for achieving a high resolution. In this work, the coaxial illumination and the auto-focusing system are proposed for the direct patterning of nano-precision patterns on an opaque substrate such as a silicon wafer and a metal substrate. Through this work, 3D polymer structures and metallic patterns are fabricated on a silicon wafer using the developed process.-
dc.languageKorean-
dc.publisher한국정밀공학회-
dc.title나노 스테레오리소그래피 공정을 이용한 불투명 기판에서의 3차원 마이크로 형상 제작 방법에 관한 연구-
dc.title.alternativeDirect Patterning of 3D Microstructures on an Opaque Substrate Using Nano- Stereolithography-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume27-
dc.citation.issue10-
dc.citation.beginningpage93-
dc.citation.endingpage99-
dc.citation.publicationname한국정밀공학회지-
dc.identifier.kciidART001480646-
dc.contributor.localauthor양동열-
dc.contributor.nonIdAuthor손용-
dc.contributor.nonIdAuthor임태우-
dc.contributor.nonIdAuthor하철우-
dc.contributor.nonIdAuthor정병제-
dc.contributor.nonIdAuthor공홍진-
dc.subject.keywordAuthorNano-Stereolithography (나노 스테레오리소그래피)-
dc.subject.keywordAuthorTwo-photon Absorption (이광자 흡수현상)-
dc.subject.keywordAuthorFemtosecond Laser (펨토초 레이저)-
dc.subject.keywordAuthorOpaque Substrate (불투명 기판)-
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ME-Journal Papers(저널논문)
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