Serially Connected Weight-Balanced Digital Actuators for Wide-Range High-Precision Low-Voltage-Displacement Control

Cited 2 time in webofscience Cited 0 time in scopus
  • Hit : 276
  • Download : 0
DC FieldValueLanguage
dc.contributor.authorLee, JYko
dc.contributor.authorLee, WCko
dc.contributor.authorCho, Young-Hoko
dc.date.accessioned2013-03-09T17:42:27Z-
dc.date.available2013-03-09T17:42:27Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2009-08-
dc.identifier.citationJOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.18, pp.792 - 798-
dc.identifier.issn1057-7157-
dc.identifier.urihttp://hdl.handle.net/10203/97026-
dc.description.abstractThis paper presents the design, fabrication, and characterization of a new serial digital actuator, achieving an improvement in range-to-precision and range-to-voltage performance. We propose a weight-balanced design for the serial actuators with serpentine springs with a serial arrangement of unit digital actuators. We have measured the displacement range, precision, and drive voltage of unit and serial actuation at 1 Hz. The serial digital actuators produce a full-range displacement of 28.44 +/- 0.02 mu m, accumulating unit displacements of 2.8 +/- 0.5 mu m at an operating voltage of 4.47 +/- 0.07 V. In addition, the serial digital actuators that have a displacement precision of 37.94 +/- 6.26 nm do not accumulate the displacement errors of the unit actuators, i. e., 36.0 +/- 17.7 nm. We experimentally verify that the serial digital actuators achieve a range-to-squared-voltage ratio of 1.423 mu m/V(2) and a range-to-precision ratio of 749.6.-
dc.languageEnglish-
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC-
dc.subjectMEMS-
dc.titleSerially Connected Weight-Balanced Digital Actuators for Wide-Range High-Precision Low-Voltage-Displacement Control-
dc.typeArticle-
dc.identifier.wosid000268641700003-
dc.identifier.scopusid2-s2.0-68849129091-
dc.type.rimsART-
dc.citation.volume18-
dc.citation.beginningpage792-
dc.citation.endingpage798-
dc.citation.publicationnameJOURNAL OF MICROELECTROMECHANICAL SYSTEMS-
dc.identifier.doi10.1109/JMEMS.2009.2023843-
dc.contributor.localauthorCho, Young-Ho-
dc.contributor.nonIdAuthorLee, JY-
dc.contributor.nonIdAuthorLee, WC-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorActuators-
dc.subject.keywordPlusMEMS-
Appears in Collection
BiS-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 2 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0