DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, JY | ko |
dc.contributor.author | Lee, WC | ko |
dc.contributor.author | Cho, Young-Ho | ko |
dc.date.accessioned | 2013-03-09T17:42:27Z | - |
dc.date.available | 2013-03-09T17:42:27Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2009-08 | - |
dc.identifier.citation | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.18, pp.792 - 798 | - |
dc.identifier.issn | 1057-7157 | - |
dc.identifier.uri | http://hdl.handle.net/10203/97026 | - |
dc.description.abstract | This paper presents the design, fabrication, and characterization of a new serial digital actuator, achieving an improvement in range-to-precision and range-to-voltage performance. We propose a weight-balanced design for the serial actuators with serpentine springs with a serial arrangement of unit digital actuators. We have measured the displacement range, precision, and drive voltage of unit and serial actuation at 1 Hz. The serial digital actuators produce a full-range displacement of 28.44 +/- 0.02 mu m, accumulating unit displacements of 2.8 +/- 0.5 mu m at an operating voltage of 4.47 +/- 0.07 V. In addition, the serial digital actuators that have a displacement precision of 37.94 +/- 6.26 nm do not accumulate the displacement errors of the unit actuators, i. e., 36.0 +/- 17.7 nm. We experimentally verify that the serial digital actuators achieve a range-to-squared-voltage ratio of 1.423 mu m/V(2) and a range-to-precision ratio of 749.6. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | MEMS | - |
dc.title | Serially Connected Weight-Balanced Digital Actuators for Wide-Range High-Precision Low-Voltage-Displacement Control | - |
dc.type | Article | - |
dc.identifier.wosid | 000268641700003 | - |
dc.identifier.scopusid | 2-s2.0-68849129091 | - |
dc.type.rims | ART | - |
dc.citation.volume | 18 | - |
dc.citation.beginningpage | 792 | - |
dc.citation.endingpage | 798 | - |
dc.citation.publicationname | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | - |
dc.identifier.doi | 10.1109/JMEMS.2009.2023843 | - |
dc.contributor.localauthor | Cho, Young-Ho | - |
dc.contributor.nonIdAuthor | Lee, JY | - |
dc.contributor.nonIdAuthor | Lee, WC | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Actuators | - |
dc.subject.keywordPlus | MEMS | - |
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