DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kwack, Won-Sub | ko |
dc.contributor.author | Moon, Hyoung-Seok | ko |
dc.contributor.author | Jeong, Seong-Jun | ko |
dc.contributor.author | Wang, Qi-min | ko |
dc.contributor.author | Kwon, Se-Hun | ko |
dc.date.accessioned | 2013-03-09T00:20:41Z | - |
dc.date.available | 2013-03-09T00:20:41Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2011-03 | - |
dc.identifier.citation | TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA, v.21, pp.S88 - S91 | - |
dc.identifier.issn | 1003-6326 | - |
dc.identifier.uri | http://hdl.handle.net/10203/94791 | - |
dc.description.abstract | IrO2-TiO2 thin films were prepared by atomic layer deposition using Ir(EtCp)(COD) and titanium isopropoxide (TTIP). The resistivity of IrO2-TiO2 thin films can be easily controlled from 1 500 to 356.7 mu Omega.cm by the IrO2 intermixing ratio from 0.55 to 0.78 in the IrO2-TiO2 thin films. The low temperature coefficient of resistance(TCR) values can be obtained by adopting IrO2-TiO2 composite thin films. Moreover, the change in the resistivity of IrO2-TiO2 thin films was below 10% even after O-2 annealing process at 600 degrees C. The step stress test results show that IrO2-TiO2 films have better characteristics than conventional TaN0.8 heater resistor. Therefore, IrO2-TiO2 composite thin films can be used as a heater resistor material in thermal inkjet printhead. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.subject | TA | - |
dc.subject | STABILITY | - |
dc.subject | RUO2 | - |
dc.title | Hybrid functional IrO(2)-TiO(2) thin film resistor prepared by atomic layer deposition for thermal inkjet printheads | - |
dc.type | Article | - |
dc.identifier.wosid | 000290093400018 | - |
dc.identifier.scopusid | 2-s2.0-79955581602 | - |
dc.type.rims | ART | - |
dc.citation.volume | 21 | - |
dc.citation.beginningpage | S88 | - |
dc.citation.endingpage | S91 | - |
dc.citation.publicationname | TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA | - |
dc.contributor.nonIdAuthor | Kwack, Won-Sub | - |
dc.contributor.nonIdAuthor | Moon, Hyoung-Seok | - |
dc.contributor.nonIdAuthor | Wang, Qi-min | - |
dc.contributor.nonIdAuthor | Kwon, Se-Hun | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | IrO2-TiO2 film | - |
dc.subject.keywordAuthor | heating resistor | - |
dc.subject.keywordAuthor | inkjet | - |
dc.subject.keywordPlus | TA | - |
dc.subject.keywordPlus | STABILITY | - |
dc.subject.keywordPlus | RUO2 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.