Magnetic resonance (MR) microscopy of up to 1-5-mu m resolutions have been reported previously. The tested phantom structures, however, had widths one order of magnitude bigger than the reported resolutions, e. g., spherical beads or capillary tubes of tens-of-micron diameters or wall thicknesses have been imaged. In this study, we fabricated structures having a few micron widths on a silicon wafer and imaged them using our 1-mu m-resolution MR microscopy at 14.1 T. Micron scale width structures were, for the first time, resolved by MR microscopy. (C) 2009 Elsevier Inc. All rights reserved.