DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Chang-Hoon | ko |
dc.contributor.author | Lee, Wook-Seong | ko |
dc.contributor.author | Choi, Yang-Kyu | ko |
dc.date.accessioned | 2013-03-08T15:13:33Z | - |
dc.date.available | 2013-03-08T15:13:33Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2010-10 | - |
dc.identifier.citation | IEEE ELECTRON DEVICE LETTERS, v.31, no.10, pp.1152 - 1154 | - |
dc.identifier.issn | 0741-3106 | - |
dc.identifier.uri | http://hdl.handle.net/10203/93371 | - |
dc.description.abstract | A nanocrystalline diamond gate field-effect transistor (FET) is demonstrated for the improvement of ON-state current with a CMOS-compatible process. A nanocrystalline diamond film was deposited on a Si(3)N(4)/SiO(2) gate dielectric as a gate material. The diamond thin film served as a gate electrode; hence, an n-channel FET was successfully demonstrated. As a control group, a polysilicon gate FET with the same structure was also fabricated. Compared to the polysilicon gate FET, the diamond gate FET showed doubled ON-state current, which was primarily attributed to the strain effect of the diamond gate acting on the channel. | - |
dc.language | English | - |
dc.publisher | IEEE-Inst Electrical Electronics Engineers Inc | - |
dc.subject | FIELD-EFFECT TRANSISTORS | - |
dc.subject | FILMS | - |
dc.subject | CVD | - |
dc.title | Nanocrystalline Diamond Gate FET for ON-State Current Improvement | - |
dc.type | Article | - |
dc.identifier.wosid | 000283353900028 | - |
dc.identifier.scopusid | 2-s2.0-77957568855 | - |
dc.type.rims | ART | - |
dc.citation.volume | 31 | - |
dc.citation.issue | 10 | - |
dc.citation.beginningpage | 1152 | - |
dc.citation.endingpage | 1154 | - |
dc.citation.publicationname | IEEE ELECTRON DEVICE LETTERS | - |
dc.identifier.doi | 10.1109/LED.2010.2058992 | - |
dc.contributor.localauthor | Choi, Yang-Kyu | - |
dc.contributor.nonIdAuthor | Lee, Wook-Seong | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Diamond gate | - |
dc.subject.keywordAuthor | high-performance field-effect transistor | - |
dc.subject.keywordAuthor | nanocrystalline diamond | - |
dc.subject.keywordAuthor | strain effect | - |
dc.subject.keywordAuthor | stress effect | - |
dc.subject.keywordPlus | FIELD-EFFECT TRANSISTORS | - |
dc.subject.keywordPlus | FILMS | - |
dc.subject.keywordPlus | CVD | - |
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