DSpace at KOASAS
College of Engineering(공과대학)Dept. of Bio and Brain Engineering(바이오및뇌공학과)BiS-Journal Papers(저널논문)

Inorganic polymer photoresist for direct ceramic patterning by photolithography

Cited 19 time in webofscience Cited 0 time in scopus
  • Hit : 410
  • Download : 0
Export
DC FieldValueLanguage
dc.contributor.authorPham, Tuan Anhko
dc.contributor.authorKim, Pilnamko
dc.contributor.authorKwak, Moonkyooko
dc.contributor.authorSuh, Kahp Y.ko
dc.contributor.authorKim, Dong-Pyoko
dc.date.accessioned2013-03-08T12:55:44Z-
dc.date.available2013-03-08T12:55:44Z-
dc.date.created2012-07-13-
dc.date.created2012-07-13-
dc.date.issued2007-
dc.identifier.citationCHEMICAL COMMUNICATIONS, no.39, pp.4021 - 4023-
dc.identifier.issn1359-7345-
dc.identifier.urihttp://hdl.handle.net/10203/93061-
dc.description.abstractA novel negative, inorganic polymer photoresist was demonstrated to be suitable for simple and direct fabrication of tribological SiCN-based ceramic microstructures via UV photolithography and subsequent pyrolysis at 800 degrees C.-
dc.languageEnglish-
dc.publisherROYAL SOC CHEMISTRY-
dc.subjectSICN MEMS-
dc.subjectFABRICATION-
dc.subjectMICROSTRUCTURES-
dc.subjectCOMPOSITES-
dc.titleInorganic polymer photoresist for direct ceramic patterning by photolithography-
dc.typeArticle-
dc.identifier.wosid000249925400020-
dc.identifier.scopusid2-s2.0-34948853244-
dc.type.rimsART-
dc.citation.issue39-
dc.citation.beginningpage4021-
dc.citation.endingpage4023-
dc.citation.publicationnameCHEMICAL COMMUNICATIONS-
dc.identifier.doi10.1039/b708480c-
dc.contributor.localauthorKim, Pilnam-
dc.contributor.nonIdAuthorPham, Tuan Anh-
dc.contributor.nonIdAuthorKwak, Moonkyoo-
dc.contributor.nonIdAuthorSuh, Kahp Y.-
dc.contributor.nonIdAuthorKim, Dong-Pyo-
dc.type.journalArticleArticle-
dc.subject.keywordPlusSICN MEMS-
dc.subject.keywordPlusFABRICATION-
dc.subject.keywordPlusMICROSTRUCTURES-
dc.subject.keywordPlusCOMPOSITES-
Appears in Collection
BiS-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 19 items in WoS Click to see citing articles in records_button

Display Simple Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0